Perturbed angular correlation spectroscopy of implantation-damaged indium nitride
- 1. The Australian Defence Force Academy, Canberra, ACT (Australia). University of New South Wales, School of Physical, Environmental and Mathematical Sciences
- 2. Australian National University, Canberra, ACT (Australia). Research School of Physical Sciences and Engineering, Department of Nuclear Physics and Faculty of Science, Department of Physics
- 3. Australian National University, Canberra, ACT (Australia). Research School of Physical Sciences and Engineering, Department of Nuclear Physics and Department of Electronic Materials Engineering
Description
Full text: Indium nitride is predicted to have technological applications such as in high frequency transistors. However, information on implantation-induced damage and annealing is limited. In this work the radioisotope probe 111ln/Cd has been implanted into indium nitride films as 111InO- ions at 125 ReV and 1014 ions/cm2. Perturbed angular correlation spectroscopy on the as-implanted films shows the quadrupole interaction frequency of indium metal indicating that severe damage and nitrogen effusion occurs for such a fluence. Following annealing an additional frequency of T 56 MHz is observed, which may be associated with diffusion of some of the111WCd probes into the unimplanted region of InN or formation of polycrystalline or amorphous indium oxides. Copyright (2005) Australian Institute of Physics
Additional details
Identifiers
Publishing Information
- Imprint Title
- 16th National Congress of the Australian Institute of Physics. Congress Proceedings Handbook and Abstracts
- Imprint Pagination
- 268 p.
- Journal Page Range
- p. 190
Conference
- Title
- 16. National Congress of the Australian Institute of Physics. Physics for the Nation
- Dates
- 30 Jan - 4 Feb 2005
- Place
- Canberra, ACT (Australia)
INIS
- Country of Publication
- Australia
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 37101811
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference, Non-conventional Literature
- Descriptors DEI
- ANNEALING; DIFFUSION; FILMS; INDIUM 111; INDIUM NITRIDES; INDIUM OXIDES; ION IMPLANTATION; MHZ RANGE; NITROGEN; PERTURBED ANGULAR CORRELATION; PHYSICAL RADIATION EFFECTS; POLYCRYSTALS; QUADRUPOLES; SPECTROSCOPY; TRANSISTORS
- Descriptors DEC
- ANGULAR CORRELATION; BETA DECAY RADIOISOTOPES; CHALCOGENIDES; CORRELATIONS; CRYSTALS; DAYS LIVING RADIOISOTOPES; ELECTRON CAPTURE RADIOISOTOPES; ELEMENTS; FREQUENCY RANGE; HEAT TREATMENTS; INDIUM COMPOUNDS; INDIUM ISOTOPES; INTERMEDIATE MASS NUCLEI; ISOMERIC TRANSITION ISOTOPES; ISOTOPES; MINUTES LIVING RADIOISOTOPES; MULTIPOLES; NITRIDES; NITROGEN COMPOUNDS; NONMETALS; NUCLEI; ODD-EVEN NUCLEI; OXIDES; OXYGEN COMPOUNDS; PNICTIDES; RADIATION EFFECTS; RADIOISOTOPES; SEMICONDUCTOR DEVICES