Published December 2007 | Version v1
Journal article Metadata-only

A study on titanium-containing diamond-like carbon films by filtered cathodic vacuum arc technology

Creators

  • 1. Institute of Low Energy Nuclear Physics, Beijing Normal Univ., Beijing Radiation Center, Beijing (China)

Description

Titanium-containing diamond-like carbon films were deposited on silicon substrate by filtered cathodic vacuum arc (FCVA) technology, Effects of C2H2 flow rate and duct current on the composition and structures of the titanium-containing diamond like carbon films were studied. The results showed that the titanium-containing diamond like carbon films were composed of TiC and diamond like carbon structure. The C2H2 flow rate and duct current affected significantly on the composition and structures of the films. The Ti content in the films decreased, but the C content increased, with increasing C2H2 flow rate and duct current. (authors)

Additional details

Publishing Information

Journal Title
Nuclear Techniques
Journal Volume
30
Journal Issue
12
Journal Page Range
p. 971-974
ISSN
0253-3219

INIS

Country of Publication
China
Country of Input or Organization
China
INIS RN
40042706
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
ACETYLENE; DIAMONDS; DUCTS; ELECTRIC CURRENTS; FILMS; FLOW RATE; SILICON; SUBSTRATES; TITANIUM; TITANIUM CARBIDES
Descriptors DEC
ALKYNES; CARBIDES; CARBON; CARBON COMPOUNDS; CURRENTS; ELEMENTS; HYDROCARBONS; METALS; MINERALS; NONMETALS; ORGANIC COMPOUNDS; SEMIMETALS; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS

Optional Information

Notes
7 figs., 5 refs.