Molybdenum coatings on nickel, iron, copper, and stainless steel obtained by CVD method

Molibdenum coatings having a thickness of 5-30 μm were chemically deposited on 10 x 13 x 0.5 mm substrates of nickel, iron, copper and 18-8 stainless steel for 60 minutes, using the following CVD reaction; 2MoCl5(g) + 5H2(g) → 2Mo(s) + 10 HCl(g)...(1) The molybdenum coatings on nickel substrates were obtained at 550-750deg C and resisted peeling even under a thermal shock of 600-700deg C. A diffusion layer 3-10 μm thick was observed at the interface between the molybdenum and the nickel substrate. Examination using a micro X-ray diffraction meter showed that the compound MoNi4 formed in the diffusion layer. Molybdenum coatings were also deposited on iron substrates at 750-800deg C, on copper at 550-650deg C, and on 18-8 stainless steel at 550-750deg C. The molybdenum coatings on iron and copper were thicker than those on nickel. A diffusion layer was observed between molybdenum and each of the substrates. The use of nickel-plated iron substrates made it possible to obtain molybdenum coatings on iron substrates at temperatures as low as 550deg C. (author)