Published 2011
| Version v1
Miscellaneous
Effect of ion implantation on composition and properties CaF2/Si nanofilms (review)
- 1. Tashkentskij Gosudarstvennyj Tekhnicheskij Univ., Tashkent (Uzbekistan)
Description
no abstract available
Additional details
Additional titles
- Original title (Russian)
- Влияние имплантации ионов на состав и свойства нанопленок CaF
Publishing Information
- Publisher
- Universitetskaya kniga
- Imprint Place
- Moscow (Russian Federation)
- Imprint Title
- Summaries of reports of XLI International conference on physics of interactions of charged particles with crystals
- Imprint Pagination
- 211 p.
- Journal Page Range
- p. 162
- Report number
- INIS-RU--526
Conference
- Title
- 41. International conference on physics of interaction of charged particles with crystals
- Original Conference Title
- XLI mezhdunarodnaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
- Dates
- 31 May - 2 Jun 2011
- Place
- Moscow (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 43014912
- Subject category
- S77: NANOSCIENCE AND NANOTECHNOLOGY;
- Resource subtype / Literary indicator
- No Abstract, Conference
- Descriptors DEI
- ANNEALING; BARIUM IONS; CALCIUM FLUORIDES; CONCENTRATION RATIO; ION IMPLANTATION; KEV RANGE 01-10; NANOSTRUCTURES; PHYSICAL RADIATION EFFECTS; SECONDARY EMISSION; TEMPERATURE DEPENDENCE; THIN FILMS
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; CALCIUM COMPOUNDS; CALCIUM HALIDES; CHARGED PARTICLES; DIMENSIONLESS NUMBERS; EMISSION; ENERGY RANGE; FILMS; FLUORIDES; FLUORINE COMPOUNDS; HALIDES; HALOGEN COMPOUNDS; HEAT TREATMENTS; IONS; KEV RANGE; RADIATION EFFECTS
Optional Information
- Notes
- Imprint:Tezisy dokladov XLI mezhdunarodnoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami