Diagnostics of the E.C.R. caprice ion source

Spectroscopic investigation in the 10-80 nm spectral range of the plasma generated by an electron cyclotron resonance (E.C.R.) ion source has been realized. The results are based on oxygen. O V intensity line ratio measurements inside the plasma are investigated as a function of the RF power. Results are correlated with the extracted O4+ current. The electronic density and temperature have been derived from the computed results of Kato et al. Finally, first determination of ionic densities and lifetimes have been performed. (orig.)