Nanoarchitectonics of binary semiconductor Sb-Y for the application of phase-change memory device
Creators
- 1. School of Mathematics and Physics, Jiangsu University of Technology, 213001, Changzhou (China)
- 2. Key Laboratory of Microelectronic Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, 100029, Beijing (China)
- 3. Shanghai Key Laboratory for R&D and Application of Metallic Functional Materials, School of Materials Science and Engineering, Tongji University, 201804, Shanghai (China)
- 4. State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Micro-System and Information Technology, Chinese Academy of Sciences, 200050, Shanghai (China)
Description
This work systematically investigates the improvement in phase change properties and crystallization mechanism of Sb films after Y doping. Compared with the pure Sb thin films, SbY has a higher crystallizing temperature (203 ℃) and longer failure time (766 s), indicating that Y doping can enhance the thermal stability of the material in the amorphous state effectively. Y exists in an amorphous state and has an inhibitory effect on grain growth, resulting in smaller grain sizes in Y-doped Sb films. The crystallization mechanism was investigated using the Johnson-Mehl-Avrami model, and the crystallization mechanism of the Sb films before and after Y-doping is unchanged and always dominated by growth, a property that is favorable for achieving fast phase transitions. The phase change cells based on SbY films exhibit a lower energy consumption (3.5 × 10 J) than the conventional GeSbTe material. The findings demonstrate the potential of Y-doped Sb as a phase change material with excellent crystallization rate and energy consumption performance.
Additional details
Identifiers
Publishing Information
- Journal Title
- Applied Physics. A, Materials Science and Processing (Print)
- Journal Volume
- 129
- Journal Issue
- 11
- Journal Page Range
- vp.
- ISSN
- 0947-8396
- CODEN
- APAMFC
INIS
- Country of Publication
- Germany
- Country of Input or Organization
- Germany
- INIS RN
- 55034688
- Subject category
- S36: MATERIALS SCIENCE; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- AMORPHOUS STATE; CRYSTALLIZATION; DOPED MATERIALS; ENERGY CONSUMPTION; GRAIN SIZE; MEMORY DEVICES; PHASE CHANGE MATERIALS; SEMICONDUCTOR MATERIALS; THIN FILMS; YTTRIUM
- Descriptors DEC
- ELEMENTS; FILMS; MATERIALS; METALS; MICROSTRUCTURE; PHASE TRANSFORMATIONS; SIZE; TRANSITION ELEMENTS
Optional Information
- Notes
- AID: 766