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Published 2023 | Version v1
Journal article

Nanoarchitectonics of binary semiconductor Sb-Y for the application of phase-change memory device

  • 1. School of Mathematics and Physics, Jiangsu University of Technology, 213001, Changzhou (China)
  • 2. Key Laboratory of Microelectronic Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, 100029, Beijing (China)
  • 3. Shanghai Key Laboratory for R&D and Application of Metallic Functional Materials, School of Materials Science and Engineering, Tongji University, 201804, Shanghai (China)
  • 4. State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Micro-System and Information Technology, Chinese Academy of Sciences, 200050, Shanghai (China)

Description

This work systematically investigates the improvement in phase change properties and crystallization mechanism of Sb films after Y doping. Compared with the pure Sb thin films, Sb51Y49 has a higher crystallizing temperature (203 ℃) and longer failure time (766 s), indicating that Y doping can enhance the thermal stability of the material in the amorphous state effectively. Y exists in an amorphous state and has an inhibitory effect on grain growth, resulting in smaller grain sizes in Y-doped Sb films. The crystallization mechanism was investigated using the Johnson-Mehl-Avrami model, and the crystallization mechanism of the Sb films before and after Y-doping is unchanged and always dominated by growth, a property that is favorable for achieving fast phase transitions. The phase change cells based on Sb51Y49 films exhibit a lower energy consumption (3.5 × 1011 J) than the conventional Ge2Sb2Te5 material. The findings demonstrate the potential of Y-doped Sb as a phase change material with excellent crystallization rate and energy consumption performance.

Additional details

Identifiers

Publishing Information

Journal Title
Applied Physics. A, Materials Science and Processing (Print)
Journal Volume
129
Journal Issue
11
Journal Page Range
vp.
ISSN
0947-8396
CODEN
APAMFC

Optional Information

Notes
AID: 766