Published 1990 | Version v1
Report Open

Characterization of ion-implanted aluminum and iron by spectroscopic ellipsometry

Creators

  • 1. Army Materials Research Agency, Watertown, MA (USA). Materials Technology Lab.
  • 2. Oak Ridge National Lab., TN (USA)

Description

The change in the optical constants of aluminum alloy and iron samples caused by implantation with nitrogen and chromium ions has been investigated by spectroscopic ellipsometry. The objective is to develop a method for simple, non-destructive characterization of ion-implanted metals. 5 refs., 6 figs

Availability note (English)

MF available from INIS under the Report Number; OSTI as DE91008371;NTIS;INIS; US Govt. Printing Office Dep.

Files

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Additional details

Publishing Information

Imprint Pagination
6 p.
Report number
CONF-901105--96

Conference

Title
Fall meeting of the Materials Research Society.
Dates
24 Nov - 1 Dec 1990.
Place
Boston, MA (USA).

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
22042215
Subject category
S36: MATERIALS SCIENCE; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ALUMINIUM ALLOYS; CHROMIUM; ION IMPLANTATION; IRON; MEASURING METHODS; NITROGEN; OPTICAL PROPERTIES; POLARIZATION
Descriptors DEC
ALLOYS; ELEMENTS; METALS; NONMETALS; PHYSICAL PROPERTIES; TRANSITION ELEMENTS

Optional Information

Contract/Grant/Project number
Contract AC05-84OR21400