Published December 15, 2004
| Version v1
Journal article
A new generalized model of the effective mobility in MOS transistors operated from helium to room temperature
Creators
- 1. Laboratoire de Caracterisation de Composants a Semiconducteurs, Universite Chouaib Doukkali, BP 20, El Jadida (Morocco)
Description
A new model of effective mobility in MOS transistors is proposed, it explain the negative transconductance in ohmic regime at high field, evaluated the surface roughness thickness, the series resistances and also the role of coulomb collisions at low temperature. The application of the model on short channel thin oxide film transistor operated from Helium to room temperature show the best fit compared with other methods. The role of the high k dielectric gate oxide on the mobility is also studied
Additional details
Identifiers
- DOI
- 10.1016/j.mseb.2004.07.008;
- PII
- S0921-5107(04)00301-0;
Publishing Information
- Journal Title
- Materials Science and Engineering. B, Solid-State Materials for Advanced Technology
- Journal Volume
- 114-115
- Journal Page Range
- p. 269-273
- ISSN
- 0921-5107
- CODEN
- MSBTEK
Conference
- Title
- Symposium B: Material science issues in advanced CMOS source-drain engineering
- Acronym
- EMRS spring meeting 2004
- Dates
- 24-28 May 2004
- Place
- Strasbourg (France)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 37114332
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- CARRIER MOBILITY; COULOMB SCATTERING; DIELECTRIC MATERIALS; MOS TRANSISTORS; ROUGHNESS; SURFACES; TEMPERATURE DEPENDENCE; THICKNESS; THIN FILMS
- Descriptors DEC
- BASIC INTERACTIONS; DIMENSIONS; ELASTIC SCATTERING; ELECTROMAGNETIC INTERACTIONS; FILMS; INTERACTIONS; MATERIALS; MOBILITY; SCATTERING; SEMICONDUCTOR DEVICES; SURFACE PROPERTIES; TRANSISTORS
Optional Information
- Copyright
- Copyright (c) 2004 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.