Published December 15, 2004 | Version v1
Journal article

A new generalized model of the effective mobility in MOS transistors operated from helium to room temperature

  • 1. Laboratoire de Caracterisation de Composants a Semiconducteurs, Universite Chouaib Doukkali, BP 20, El Jadida (Morocco)

Description

A new model of effective mobility in MOS transistors is proposed, it explain the negative transconductance in ohmic regime at high field, evaluated the surface roughness thickness, the series resistances and also the role of coulomb collisions at low temperature. The application of the model on short channel thin oxide film transistor operated from Helium to room temperature show the best fit compared with other methods. The role of the high k dielectric gate oxide on the mobility is also studied

Additional details

Identifiers

DOI
10.1016/j.mseb.2004.07.008;
PII
S0921-5107(04)00301-0;

Publishing Information

Journal Title
Materials Science and Engineering. B, Solid-State Materials for Advanced Technology
Journal Volume
114-115
Journal Page Range
p. 269-273
ISSN
0921-5107
CODEN
MSBTEK

Conference

Title
Symposium B: Material science issues in advanced CMOS source-drain engineering
Acronym
EMRS spring meeting 2004
Dates
24-28 May 2004
Place
Strasbourg (France)

INIS

Country of Publication
Netherlands
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
37114332
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
CARRIER MOBILITY; COULOMB SCATTERING; DIELECTRIC MATERIALS; MOS TRANSISTORS; ROUGHNESS; SURFACES; TEMPERATURE DEPENDENCE; THICKNESS; THIN FILMS
Descriptors DEC
BASIC INTERACTIONS; DIMENSIONS; ELASTIC SCATTERING; ELECTROMAGNETIC INTERACTIONS; FILMS; INTERACTIONS; MATERIALS; MOBILITY; SCATTERING; SEMICONDUCTOR DEVICES; SURFACE PROPERTIES; TRANSISTORS

Optional Information

Copyright
Copyright (c) 2004 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.