Published January 1990 | Version v1
Journal article Metadata-only

Real-time monitoring of molecular-beam epitaxy processes with coaxial impact-collision ion scattering spectroscopy (CAICISS)

Creators

  • 1. RIKEN, Saitama (Japan)
  • 2. Shimadzu Corp., Kyoto (Japan)

Description

Coaxial impact-collision ion scattering spectroscopy (CAICISS) is a novel form of low-energy ion scattering spectroscopy (ISS), in which a pulsed-beam low-energy ion source and a time-of-flight ion energy analyzer are placed coaxially so as to cover the experimental scattering angle at 180deg. It is demonstrated that CAICISS is useful for monitoring molecular-beam epitaxy (MBE) processes in real time by taking the MBE growth of AlAs on a GaAs(001) substrate as an example. (orig.)

Additional details

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research, Section B
Journal Volume
45
Journal Issue
1-4
Series
Nucl. Instrum. Methods Phys. Res., Sect. B.
Journal Page Range
408-411
ISSN
0168-583X
CODEN
NIMBE

Conference

Title
9. international conference on ion beam analysis (IBA-9).
Dates
26-30 Jun 1989.
Place
Kingston (Canada).

INIS

Country of Publication
Netherlands
Country of Input or Organization
Netherlands
INIS RN
21068880
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference, Numerical Data
Descriptors DEI
ALUMINIUM ARSENIDES; ENERGY SPECTRA; EPITAXY; EXPERIMENTAL DATA; GALLIUM ARSENIDES; ION SCATTERING ANALYSIS; MOLECULAR BEAMS; MONITORING; REAL TIME SYSTEMS; TIME-OF-FLIGHT METHOD
Descriptors DEC
ALUMINIUM COMPOUNDS; ARSENIC COMPOUNDS; ARSENIDES; BEAMS; CHEMICAL ANALYSIS; DATA; GALLIUM COMPOUNDS; INFORMATION; NONDESTRUCTIVE ANALYSIS; NUMERICAL DATA; PNICTIDES; SPECTRA