Published September 1988 | Version v1
Journal article

Behavior of boron and phosphorus impurities in silicon during irradiation with neutrons and subsequent annealing

  • 1. Institute of Semiconductor Physics, Novosibirsk (USSR)

Description

The infrared absorption method in combination with electrophysical measurements was used to investigate the accumulation of radiation defects in p-type Si:B and n-type Si:P and the behavior of the B and P impurities during irradiation with neutrons and subsequent annealing. It was found that phosphorus in its ground state occupied a regular site during irradiation and subsequent annealing up to ∼200 degree C, whereas about 95% of the boron impurity was in defect complexes after irradiation

Additional details

Publishing Information

Journal Title
Soviet Physics - Semiconductors (English Translation)
Journal Volume
22
Journal Issue
9
Series
Sov. Phys. - Semicond. (Engl. Transl.).
Journal Page Range
984-988
ISSN
0038-5700
CODEN
SPSEA

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
21070799
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Translation
Descriptors DEI
ANNEALING; BORON; DATA PROCESSING; IMPURITIES; MEASURING INSTRUMENTS; MEASURING METHODS; NEUTRONS; PHOSPHORUS; PHYSICAL RADIATION EFFECTS; SEMICONDUCTOR MATERIALS; SILICON; USSR
Descriptors DEC
BARYONS; DEVELOPED COUNTRIES; ELEMENTARY PARTICLES; ELEMENTS; EUROPE; FERMIONS; HADRONS; HEAT TREATMENTS; MATERIALS; NONMETALS; NUCLEONS; RADIATION EFFECTS; SEMIMETALS

Optional Information

Notes
Cover-to-cover translation of Fizika i Tekhnika Poluprovodnikov (US SR).