Published July 1, 1985
| Version v1
Journal article
Soft x-ray lithography using radiation from laser-produced plasmas
- 1. University of Maryland, Institute for Physical Science and Technology, College Park, Maryland 20742
Description
Plasmas formed by focusing 0.6-J pulses from a 10-Hz Nd:YAG laser onto solid targets were used as soft x-ray sources for lithographic studies. Results of exposing masked photoresists to plasma radiation produced using steel, copper, and tungsten as targets are presented
Additional details
Publishing Information
- Journal Title
- Appl. Opt.
- Journal Volume
- 24
- Journal Issue
- 13
- Series
- Appl. Opt.
- Journal Page Range
- 2024-2027
- ISSN
- 0003-6935
- CODEN
- APOPA
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 17007722
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Descriptors DEI
- COATINGS; COPPER; LASER-PRODUCED PLASMA; NEODYMIUM LASERS; PULSES; SOFT X RADIATION; STEELS; TARGETS; TUNGSTEN; X-RAY SOURCES
- Descriptors DEC
- ALLOYS; AMPLIFIERS; CARBON ADDITIONS; ELECTROMAGNETIC RADIATION; ELEMENTS; EQUIPMENT; IONIZING RADIATIONS; IRON ALLOYS; IRON BASE ALLOYS; LASERS; METALS; PLASMA; RADIATION SOURCES; RADIATIONS; SOLID STATE LASERS; TRANSITION ELEMENTS; X RADIATION