Published February 1994 | Version v1
Journal article

In situ deposition of high Tc materials using vacuum arc ablation with macroparticle filter

  • 1. CSIRO Div. of Applied Physics, Lindfield, NSW (Australia)
  • 2. School of Physics, Univ. of Sydney, NSW (Australia)
  • 3. Electron Microscope Unit, Univ. of Sydney, NSW (Australia)
  • 4. Dept. of Physics, Univ. of Technology, Sydney, NSW (Australia)
  • 5. Nihon Univ., Coll. of Science and Technology, Dept. of Physics, Tokyo (Japan)
  • 6. Centre for Lasers and Applications, Macquarie Univ., Sydney (Australia)

Description

Vacuum arc ablation is shown to be a new deposition technique for depositing YBCO thin films in situ with zero resistance below 85 K. A high deposition rate was achieved from small specimens. The size of macroparticles is larger than for laser ablation for the same target material, but a curved solenoidal filter was used to reduce the macroparticle content. (orig.)

Additional details

Additional titles

Augmented title (English)
YBaCuO

Publishing Information

Journal Title
Physica. B, Condensed Matter
Journal Volume
194-196
Journal Page Range
p. 2353-2354.
ISSN
0921-4526
CODEN
PHYBE3

Conference

Title
20. IUPAP international conference on low temperature physics (LT-20).
Dates
4-11 Aug 1993.
Place
Eugene, OR (United States).