Published 1991 | Version v1
Report

Solid-state and materials research: thin-film superconductor deposition. Inverted cylindrical magnetron sputtering for thin-film superconductor deposition

  • 1. National Accelerator Centre, Faure (South Africa)
  • 2. University of the Western Cape, Bellville (South Africa)

Description

Short communication. 1 fig

Part of:
NAC annual report March 1991

Additional details

Publishing Information

ISBN
1 8748 7703 3
Imprint Title
NAC annual report March 1991
Imprint Pagination
129 p.
Journal Page Range
p. 70.
Report number
NAC-AR--91-01

INIS

Country of Publication
South Africa
Country of Input or Organization
South Africa
INIS RN
24058265
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Progress Report, No Abstract, Non-conventional Literature
Descriptors DEI
BACKSCATTERING; CYLINDERS; DEPOSITION; MAGNETRONS; OXYGEN; PROGRESS REPORT; RUTHERFORD SCATTERING; SPUTTERING; STOICHIOMETRY; SUPERCONDUCTORS; THIN FILMS
Descriptors DEC
DOCUMENT TYPES; ELASTIC SCATTERING; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; FILMS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; NONMETALS; SCATTERING

Optional Information