Published February 15, 1988
| Version v1
Journal article
Analysis of He-implanted LiNbO3 by elastic recoil detection
- 1. Department of Electronic and Electrical Engineering, University of Surrey, Guildford, Surrey GU2 5XH, England
Description
He-implanted samples of LiNbO3 have been analyzed by 24-MeV 28Si elastic recoil detection. For 50-keV He implants, the Li and H profiles show a depletion of Li from the sample near-surface region which coincides with a gain of H. The Li loss is seen to increase with increasing ion fluence and implantation temperature
Additional details
Publishing Information
- Journal Title
- J. Appl. Phys.
- Journal Volume
- 63
- Journal Issue
- 4
- Series
- J. Appl. Phys.
- Journal Page Range
- 1032-1036
- ISSN
- 0021-8979
- CODEN
- JAPIA
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 19040193
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- HELIUM IONS; ION IMPLANTATION; LITHIUM COMPOUNDS; MEV RANGE 10-100; NIOBATES; OPTICAL PROPERTIES; PHYSICAL RADIATION EFFECTS; SILICON IONS; SILICON 28; WAVEGUIDES
- Descriptors DEC
- ALKALI METAL COMPOUNDS; ATOMIC IONS; CHARGED PARTICLES; ENERGY RANGE; EVEN-EVEN NUCLEI; IONS; ISOTOPES; LIGHT NUCLEI; MEV RANGE; NIOBIUM COMPOUNDS; NUCLEI; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; RADIATION EFFECTS; SILICON ISOTOPES; STABLE ISOTOPES; TRANSITION ELEMENT COMPOUNDS