Published November 1, 2017 | Version v1
Journal article Metadata-only

Influence of target-substrate distance during pulsed laser deposition on properties of LiNbO3 thin films

Creators

  • 1. Research and Education Centre «Nanotechnology», Southern Federal University, Taganrog 347922 (Russian Federation)
  • 2. Institute of Microengineering, École polytechnique fédérale de Lausanne, Neuchâtel CH-2002 (Switzerland)
  • 3. Department of Research and Development, Belarusian State University of Informatics and Radioelectronics, Minsk 220013 (Belarus)
  • 4. Institute of Physics and Technology RAS, Moscow 117218 (Russian Federation)

Description

This paper shows the results of studying the influence of target-substrate distance during pulsed laser deposition on electrical properties of LiNbO3 thin films. It has been shown that changing the target-substrate distance we can obtain thin films with a different composition. EDX spectra indicate that the LiNbO3 thin films fabricated under 120 mm target-substrate distance depleted Nb (0.7 atm. %) compare to LiNbO3 films fabricated under 20 mm target-substrate distance (11.0 atm. %). Varying target-substrate distance in the range from 20 mm to 120 mm charge carrier mobility increasing from 24 cm2/V·s to 395 cm2/V·s and concentration of charge carrier decreasing from 3·1013 cm-3 to 1·1012 cm-3. Obtained results can be used under development and fabrication of integral acousto-optic and surface acoustic wave (SAW) devices. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/1742-6596/917/3/032024

Additional details

Identifiers

DOI
10.1088/1742-6596/917/3/032024;

Publishing Information

Journal Title
Journal of Physics. Conference Series (Online)
Journal Volume
917
Journal Issue
3
Journal Page Range
[5 p.]
ISSN
1742-6596

Conference

Title
4. International School and Conference on Optoelectronics, Photonics, Engineering and Nanostructures
Acronym
Saint Petersburg OPEN 2017
Dates
3-6 Apr 2017
Place
Saint-Petersburg (Russian Federation)

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
52061116
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
CARRIER MOBILITY; CHARGE CARRIERS; CONCENTRATION RATIO; DISTANCE; ELECTRICAL PROPERTIES; ENERGY BEAM DEPOSITION; LASER RADIATION; LASER TARGETS; LITHIUM COMPOUNDS; NIOBATES; PULSED IRRADIATION; SOUND WAVES; THIN FILMS
Descriptors DEC
ALKALI METAL COMPOUNDS; DEPOSITION; DIMENSIONLESS NUMBERS; ELECTROMAGNETIC RADIATION; FILMS; IRRADIATION; MOBILITY; NIOBIUM COMPOUNDS; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; RADIATIONS; REFRACTORY METAL COMPOUNDS; SURFACE COATING; TARGETS; TRANSITION ELEMENT COMPOUNDS