Piezo-actuated adaptive prisms for continuously adjustable bi-axial scanning

We present two piezo-actuated adaptive prisms with apertures of 8 mm based on a bi-axial continuously tiltable glass window on top of an optical fluid, enabling fast scanning applications in a compact, linear axial design. One prism with a device size of 58 by 51 mm is optimized for scan angles of ±6.4° and response times of 2.5 ms. A second compact prism uses spiral-shaped actuators to achieve a reduced device diameter of 33 mm at slightly compromised maximum scan angles of ±4.0° with response times of approximately 4 ms. We show the design and FEM-based optimization of the prisms, their fabrication and the characterization of the scan angles and of the dynamic behavior. Finally, we also demonstrate the linearity of the system and discuss a simple control model. (paper)