Published December 2004
| Version v1
Journal article
MOCVD growth of transparent conducting Cd2SnO4 thin films
- 1. Department of Chemistry, Northwestern University, Evanston, IL 60208-3113 (United States)
- 2. Department of Electrical and Computer Engineering, Northwestern University, Evanston, IL 60208-3113 (United States)
Description
The first preparation of transparent conducting Cd2SnO4 thin films by a simple MOCVD process is described. As-deposited films using Cd(hfa)2(TMEDA) (Figure), at 365 C are found to be highly crystalline with a relatively wide range of grain size of 100-300 nm. XRD indicates a cubic spinel Cd2SnO4 crystal structure and the possible presence of a small amount of CdO. The films exhibit conductivities of 2170 S/cm and a bandgap of 3.3 eV, rivaling those of commercial tin-doped indium oxide. (Abstract Copyright [2004], Wiley Periodicals, Inc.)
Availability note (English)
Available from: http://dx.doi.org/10.1002/cvde.200304177Additional details
Identifiers
Publishing Information
- Journal Title
- Chemical Vapor Deposition
- Journal Volume
- 10
- Journal Issue
- 6
- Journal Page Range
- p. 297-300
- ISSN
- 0948-1907
- CODEN
- CVDEFX
INIS
- Country of Publication
- Germany
- Country of Input or Organization
- Germany
- INIS RN
- 36019725
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ABSORPTION SPECTRA; BAND THEORY; CADMIUM OXIDES; CADMIUM STANNATES; CARRIER DENSITY; CARRIER MOBILITY; CHEMICAL VAPOR DEPOSITION; CUBIC LATTICES; ELECTRIC CONDUCTIVITY; ELECTRONIC STRUCTURE; ENERGY GAP; GRAIN SIZE; HALL EFFECT; INFRARED SPECTRA; ORGANOMETALLIC COMPOUNDS; SCANNING ELECTRON MICROSCOPY; TEMPERATURE RANGE 0000-0013 K; TEMPERATURE RANGE 0013-0065 K; TEMPERATURE RANGE 0065-0273 K; TEMPERATURE RANGE 0273-0400 K; TEMPERATURE RANGE 0400-1000 K; THIN FILMS; X-RAY DIFFRACTION
- Descriptors DEC
- CADMIUM COMPOUNDS; CHALCOGENIDES; CHEMICAL COATING; COHERENT SCATTERING; CRYSTAL LATTICES; CRYSTAL STRUCTURE; DEPOSITION; DIFFRACTION; ELECTRICAL PROPERTIES; ELECTRON MICROSCOPY; FILMS; MICROSCOPY; MICROSTRUCTURE; MOBILITY; ORGANIC COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; SCATTERING; SIZE; SPECTRA; STANNATES; SURFACE COATING; TEMPERATURE RANGE; TIN COMPOUNDS
Optional Information
- Notes
- With 4 figs., 1 tab., 35 refs.. SICI: 0948-1907(200412)10:6<297::AID-CVDE200304177>3.0.TX;2-L