Published June 1996 | Version v1
Journal article Metadata-only

Influence of formation conditions for dielectric substrate-platinum-lead zireonate-titanate thin film system on structure, composition and properties of lead zirconate-titanate films

Creators

  • 1. AN SSSR, Leningrad (Russian Federation). Fiziko-Tekhnicheskij Inst.

Description

Structure of lead zirconate-titanate (ZTL) films and lower platinum electrode is studied by a x ray diffraction, electron diffraction analysis methods. Profiles of element distribution by depth in ZTL-Pt-dielectric substrate system are obtained by Auger-electron spectroscopy. Using a scanned tunnel profilometer, Pt and ZTL film surface morphology is studied. It is ascertained that both stoichiometric composition violation and inhomogeneous distribution of lead and oxygen by thickness take place at increased substrate temperatures during ZTL film precipitation. 10 refs.; 5 figs

Additional details

Additional titles

Original title (Russian)
Влияние условий формирования тонкопленочной системы диэлектрическая подложка-платина-титанат-цирконат свинца на структуру, состав и свойства пленок цирконата-титаната свинца

Publishing Information

Journal Title
Zhurnal Tekhnicheskoj Fiziki
Journal Volume
66
Journal Issue
6
Journal Page Range
p. 160-169.
ISSN
0044-4642
CODEN
ZTEFA3

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
28056641
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
CHEMICAL COMPOSITION; CRYSTAL STRUCTURE; DIELECTRIC MATERIALS; PLATINUM; PZT; ROUGHNESS; SPRAY COATING; SPUTTERING; SUBSTRATES; THIN FILMS
Descriptors DEC
DEPOSITION; ELEMENTS; FILMS; LEAD COMPOUNDS; MATERIALS; METALS; OXYGEN COMPOUNDS; PLATINUM METALS; SURFACE COATING; SURFACE PROPERTIES; TITANATES; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS; ZIRCONATES; ZIRCONIUM COMPOUNDS