Published 2011
| Version v1
Miscellaneous
Development of GaN-based nanosensors using surface charge lithography
Creators
- 1. National Center for Materials Study and Testing, Technical Univ. of Moldova, Stefan cel Mare av. 168, MD-2004, Chisinau (Moldova, Republic of)
- 2. Technical Univ. Darmstadt, 23584, Darmstadt (Germany)
- 3. H.H. Wills Physics Lab., Univ. of Bristol, Tyndall Avenue, Bristol BS81TL, Bristol (United Kingdom)
- 4. Interface Analysis Centre, Oldbury House, 121 St. Michael's Hill, Bristol BS28BS, Bristol (United Kingdom)
Description
Semiconductor nanotechnology is a fast developing branch of modern engineering that offers perspectives for the development of electronic devices with superior parameters. A special and important niche in nanotechnology is allocated to the fabrication of nanosensors which are expected to exhibit higher sensitivity in comparison with classical microelectronic sensors. Various aspects of fabrication of GaN based nanosensors using Surface Charge Lithography are discussed and preliminary tests for gas sensors applications are presented.
Additional details
Publishing Information
- Publisher
- Technical University of Moldova
- Imprint Place
- Chisinau (Moldova, Republic of)
- ISBN
- 978-9975-66-239-0
- Imprint Title
- ICNBME-2011: International Conference on Nanotechnologies and Biomedical Engineering; German-Moldovan Workshop on Novel Nanomaterials for Electronic, Photonic and Biomedical Applications. Proceedings
- Imprint Pagination
- 460 p.
- Journal Page Range
- p. 36-38
- Report number
- INIS-MD--008
Conference
- Title
- International Conference on Nanotechnologies and Biomedical Engineering; German-Moldovan Workshop on Novel Nanomaterials for Electronic, Photonic and Biomedical Applications. Proceedings
- Acronym
- ICNBME-2011
- Dates
- 7-8 Jul 2011
- Place
- Chisinau (Moldova, Republic of)
INIS
- Country of Publication
- Moldova, Republic of
- Country of Input or Organization
- Moldova, Republic of
- INIS RN
- 42086289
- Subject category
- S77: NANOSCIENCE AND NANOTECHNOLOGY;
- Resource subtype / Literary indicator
- Conference, Non-conventional Literature
- Descriptors DEI
- CHEMICAL VAPOR DEPOSITION; ELECTRONIC EQUIPMENT; ETCHING; GALLIUM COMPOUNDS; GALLIUM NITRIDES; ION BEAMS; NANOSTRUCTURES; NITRIDES; NITROGEN COMPOUNDS; SENSORS; SURFACE COATING; TEMPERATURE RANGE 1000-4000 K; WIRES
- Descriptors DEC
- BEAMS; CHEMICAL COATING; DEPOSITION; EQUIPMENT; GALLIUM COMPOUNDS; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; SURFACE COATING; SURFACE FINISHING; TEMPERATURE RANGE
Optional Information
- Notes
- 5 refs., 4 figs.