Nanoposition sensors with superior linear response to position and unlimited travel ranges

With the advancement in nanotechnology, the ability of positioning/measuring at subnanometer scale has been one of the most critical issues for the nanofabrication industry and researchers using scanning probe microscopy. Commercial nanopositioners have achieved direct measurements at the scale of 0.01 nm with capacitive sensing metrology. However, the commercial sensors have small dynamic ranges (up to only a few hundred micrometers) and are relatively large in size (centimeters in the transverse directions to the motion), which is necessary for healthy signal detections but making it difficult to use on smaller devices. This limits applications in which large materials (on the scale of centimeters or greater) are handled with needs of subnanometer resolutions. What has been done in the past is to combine the fine and coarse translation stages with different dynamic ranges to simultaneously achieve long travel range and high spatial resolution. In this paper, we present a novel capacitive position sensing metrology with ultrawide dynamic range from subnanometer to literally any practically desired length for a translation stage. This sensor will greatly simplify the task and enhance the performance of direct metrology in a hybrid translational stage covering translation tasks from subnanometer to centimeters.