Published 1990 | Version v1
Miscellaneous

Edge effects at multicharge local implantation

Description

Short note

Additional details

Additional titles

Original title (Russian)
Краевые эффекты при многоступенчатой локальной имплантации

Publishing Information

Imprint Title
Theses of reports of the 20. All-union conference on physics of charged particles interaction with crystals
Imprint Pagination
170 p.
Journal Page Range
p. 115.
Report number
INIS-SU--220

Conference

Title
20. All-union conference on physics of charged particles interaction with crystals.
Dates
28-30 May 1990.
Place
Moscow (USSR).

INIS

Country of Publication
USSR
Country of Input or Organization
USSR
INIS RN
22020422
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
ANNEALING; CRYSTALS; DEPTH; DIFFUSION; GALLIUM ARSENIDES; HIGH TEMPERATURE; ION IMPLANTATION; SELENIUM IONS; SILICON IONS
Descriptors DEC
ARSENIC COMPOUNDS; ARSENIDES; ATOMIC IONS; CHARGED PARTICLES; DIMENSIONS; GALLIUM COMPOUNDS; HEAT TREATMENTS; IONS; PNICTIDES

Optional Information

Notes
Imprint:Tezisy dokladov 20. Vsesoyuznogo soveshchaniya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami.