Published 1990
| Version v1
Miscellaneous
Edge effects at multicharge local implantation
Creators
Description
Short note
Additional details
Additional titles
- Original title (Russian)
- Краевые эффекты при многоступенчатой локальной имплантации
Publishing Information
- Imprint Title
- Theses of reports of the 20. All-union conference on physics of charged particles interaction with crystals
- Imprint Pagination
- 170 p.
- Journal Page Range
- p. 115.
- Report number
- INIS-SU--220
Conference
- Title
- 20. All-union conference on physics of charged particles interaction with crystals.
- Dates
- 28-30 May 1990.
- Place
- Moscow (USSR).
INIS
- Country of Publication
- USSR
- Country of Input or Organization
- USSR
- INIS RN
- 22020422
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference, No Abstract
- Descriptors DEI
- ANNEALING; CRYSTALS; DEPTH; DIFFUSION; GALLIUM ARSENIDES; HIGH TEMPERATURE; ION IMPLANTATION; SELENIUM IONS; SILICON IONS
- Descriptors DEC
- ARSENIC COMPOUNDS; ARSENIDES; ATOMIC IONS; CHARGED PARTICLES; DIMENSIONS; GALLIUM COMPOUNDS; HEAT TREATMENTS; IONS; PNICTIDES
Optional Information
- Notes
- Imprint:Tezisy dokladov 20. Vsesoyuznogo soveshchaniya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami.