Published 1984 | Version v1
Book Metadata-only

Some recent observations on the properties of UHV-deposited ZrO/sub 2/

Creators

  • 1. K.C. Jungling: Univ. of New Mexico, Albuquerque, NM

Description

Single-layer ZrO/sub 2/ coatings were deposited in an ultrahigh vacuum system by two techniques: laser evaporation (utilizing a 100-W, continuous wave, CO/sub 2/ laser) and electron-beam evaporation. Substrate temperatures were maintained at either 1500C or 2500C with backfill oxygen pressures between 0 and 5x10/sup -5/ torr. The coatings were analyzed by Auger Electron Spectroscopy to determine stoichiometry and to provide information on the nature and level of impurities. The refractive indices for the coatings were determined by ellipsometry at 6328 A. Selected coatings were damage tested at 531 nm. This report discusses the influence of backfill pressure, substrate temperature and evaporation technique on thin film properties and compares the results obtained by Auger and ellipsometric analyses. Also presented is a comparison between films prepared under high vacuum and ultrahigh vacuum conditions

Additional details

Publishing Information

Publisher
National Bureau of Standards.
Imprint Place
Gaithersburg, MD (USA)
Imprint Title
Laser induced damage in optical materials: 1984
Journal Page Range
p. 171-179.

Conference

Title
Symposium on optical materials for high power lasers.
Dates
15-17 Oct 1984.
Place
Boulder, CO (USA).

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
18072637
Subject category
S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
AUGER ELECTRON SPECTROSCOPY; CARBON DIOXIDE LASERS; CHEMICAL PREPARATION; FILMS; IMPURITIES; LASER RADIATION; MEASURING METHODS; PHYSICAL RADIATION EFFECTS; POLARIZATION; PRESSURE DEPENDENCE; REFRACTIVE INDEX; STOICHIOMETRY; SURFACE COATING; TEMPERATURE DEPENDENCE; VACUUM COATING; VACUUM EVAPORATION; VACUUM SYSTEMS; ZIRCONIUM OXIDES
Descriptors DEC
AMPLIFIERS; CHALCOGENIDES; DEPOSITION; ELECTROMAGNETIC RADIATION; ELECTRON SPECTROSCOPY; EQUIPMENT; EVAPORATION; GAS LASERS; LASERS; OPTICAL PROPERTIES; OXIDES; OXYGEN COMPOUNDS; PHASE TRANSFORMATIONS; PHYSICAL PROPERTIES; RADIATION EFFECTS; RADIATIONS; SPECTROSCOPY; SYNTHESIS; TRANSITION ELEMENT COMPOUNDS; ZIRCONIUM COMPOUNDS