Published September 30, 2013
| Version v1
Journal article
Drifting potential humps in ionization zones: The "propeller blades" of high power impulse magnetron sputtering
- 1. Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720 (United States)
- 2. Jožef Stefan Institute, Jamova 39, 1000 Ljubljana (Slovenia)
- 3. Montanuniversität Leoben, Franz-Josef-Strasse 18, 8700 Leoben (Austria)
- 4. Centre for Quantum Technologies, National University of Singapore, 3 Science Drive 2, 117543 Singapore (Singapore)
Description
Ion energy distribution functions measured for high power impulse magnetron sputtering show features, such as a broad peak at several 10 eV with an extended tail, as well as asymmetry with respect to E×B, where E and B are the local electric and magnetic field vectors, respectively. Here it is proposed that those features are due to the formation of a potential hump of several 10 V in each of the traveling ionization zones. Potential hump formation is associated with a negative-positive-negative space charge that naturally forms in ionization zones driven by energetic drifting electrons
Additional details
Identifiers
- DOI
- 10.1063/1.4823827;
Publishing Information
- Journal Title
- Applied Physics Letters
- Journal Volume
- 103
- Journal Issue
- 14
- Journal Page Range
- p. 144103-144103.4
- ISSN
- 0003-6951
- CODEN
- APPLAB
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 45038914
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ASYMMETRY; DISTRIBUTION FUNCTIONS; ELECTRON DRIFT; ENERGY SPECTRA; EV RANGE; IONIZATION; IONS; MAGNETIC FIELDS; MAGNETRONS; PEAKS; PLASMA; POTENTIALS; PROCESSING; PULSES; SPACE CHARGE; SPUTTERING; VECTORS; ZONES
- Descriptors DEC
- CHARGED PARTICLES; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ENERGY RANGE; EQUIPMENT; FUNCTIONS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; SPECTRA; TENSORS
Optional Information
- Notes
- (c) 2013 AIP Publishing LLC