Published 2005
| Version v1
Book
Sputtering coefficient dependence on the incidence angle of ions on a target
Creators
Description
The theory of the sputtering coefficient (SC) dependence on the ion incidence angle on a target is derived. As a result a nonmonotonous curve with a maximum is obtained. The maximum position and its height agree well with experimental data
Abstract (Russian)
Построена теория зависимости коэффициента распыления (КР) от угла падения ионов на мишень. В результате для угловой зависимости КР получена немонотонная кривая с максимумом, положение и высота которого хорошо согласуются с данными экспериментаAdditional details
Additional titles
- Original title (Russian)
- Зависимость коэффициента распыления от угла падения ионов на мишень
Publishing Information
- Publisher
- Izd-vo MAI
- Imprint Place
- Moscow (Russian Federation)
- ISBN
- 5-7035-1560-2
- Imprint Title
- Book of reports of XVII International conference Ion-surface interactions ISI-2005. Vol. 1
- Imprint Pagination
- 600 p.
- Journal Page Range
- p. 164-167
Conference
- Title
- 17. International conference Ion-surface interactions ISI-2005
- Original Conference Title
- XVII Mezhdunarodnaya konferentsiya Vzaimodejstvie ionov s poverkhnost'yu (VIP-2005)
- Dates
- 25-29 Aug 2005
- Place
- Zvenigorod (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 38067501
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ANALYTICAL SOLUTION; ANGULAR DISTRIBUTION; ARGON IONS; COMPARATIVE EVALUATIONS; COMPUTERIZED SIMULATION; COPPER; INCIDENCE ANGLE; KEV RANGE 10-100; PARAMETRIC ANALYSIS; SPUTTERING
- Descriptors DEC
- CHARGED PARTICLES; DISTRIBUTION; ELEMENTS; ENERGY RANGE; EVALUATION; IONS; KEV RANGE; MATHEMATICAL SOLUTIONS; METALS; SIMULATION; TRANSITION ELEMENTS
Optional Information
- Notes
- 5 refs., 2 figs. Imprint:Materialy XVII Mezhdunarodnoj konferentsii Vzaimodejstvie ionov s poverkhnost'yu (VIP-2005). Tom 1