Study of processes of magnetron spraying of films of 123, 247, 124 composition yttrium-barium ceramics

A study was made on films of magnetron spraying (steady current) of yttrium-barium ceramics in the vicinity of 123, 247 and 124 compositions on monocrystalline α-Al2O3, SrTiO3 sublayers. Films on SrTiO3 sublayers after annealing were characterized by the following parameters of superconducting (SC) transition: 123-Ti=93K, Tf=90K; 247-Ti=93K, 40 K; 124-Ti=93K, Tf=50K with ∼104 A/cm2 critical current in films of 123 composition, SC transition in films of all compositions on α-Al2O3 sublayers was equally wide: Ti=72K, Tf=20 K. Methods of electron-probe microanalysis and reflective electron diffraction were used to reveal, that all films on sublayers of both types were mainly crystallized in 123 polycrystalline phase