''All-in-One'' Chip Fabrication by 3D Femtosecond Laser Microprocessing for Biophotonics

We developed a novel technique fabricating 3D hollow microstructures embedded in photosensitive glass. The fabrication procedure consists of the following three steps: (1) femtosecond laser direct writing, (2) thermal treatment, and (3) wet etching in a diluted HF solution. The developed technique can fabricate various microcomponents such as microfluidics, microvalve, micromirror, microsplitter, freestanding fibre, and microfluidic laser. In this paper, integration of these microcomponents in a single glass chip by a single procedure is demonstrated for 'all-in-one' lab-on-a-chip device manufacture