Published February 1, 2011 | Version v1
Journal article Metadata-only

Fabrication of 1x3 Multimode Interference based Beam Splitter on Silicon Nanomembrane

Creators

  • 1. Microelectronics Research Center, Department of Electrical and Computer Engineering, University of Texas at Austin, Austin, TX 78758 (United States)

Description

We present a 1x3 multimode interference based beam splitter on silicon-on-insulator wafer with very thin silicon layer. The device exhibits low cross-talk and high uniformity at 1550nm wavelength.

Availability note (English)

Available from http://dx.doi.org/10.1088/1742-6596/276/1/012100

Additional details

Identifiers

DOI
10.1088/1742-6596/276/1/012100;

Publishing Information

Journal Title
Journal of Physics. Conference Series (Online)
Journal Volume
276
Journal Issue
1
Journal Page Range
[4 p.]
ISSN
1742-6596

Conference

Title
3. international Photonics and OptoElectronics Meetings
Acronym
POEM 2010
Dates
2-5 Nov 2010
Place
Wuhan (China)

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
43044710
Subject category
S77: NANOSCIENCE AND NANOTECHNOLOGY; S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
Resource subtype / Literary indicator
Conference
Descriptors DEI
BEAM SPLITTING; EQUIPMENT; FABRICATION; INTERFERENCE; LAYERS; NANOSTRUCTURES; SILICON; WAVELENGTHS
Descriptors DEC
ELEMENTS; SEMIMETALS