Published May 1999
| Version v1
Journal article
Synchrotron radiation gives shape to matter
Creators
Description
The LIGA technology was invented 15 years ago in Germany. A photo-sensible resin is irradiated through a mask, then the chemical dissolution of the resin forms a raised relief pattern that can be electroplated. This X-ray deep lithography technique is very well adapted to produce reduced-size mechanical parts of motors, sensors and actuators. (A.C.)
Additional details
Additional titles
- Original title (French)
- Quand le rayonnement synchrotron sculpte la matiere
Publishing Information
- Journal Title
- Recherche (Paris)
- Journal Issue
- no.320
- Journal Page Range
- p. 24
- ISSN
- 0029-5671
- CODEN
- RCCHBV
INIS
- Country of Publication
- France
- Country of Input or Organization
- France
- INIS RN
- 31008290
- Subject category
- S07: ISOTOPES AND RADIATION SOURCES;
- Descriptors DEI
- CHEMICAL RADIATION EFFECTS; MECHANICAL ENGINEERING; PHYSICAL RADIATION EFFECTS; RESINS; SYNCHROTRON RADIATION; USES
- Descriptors DEC
- BREMSSTRAHLUNG; ELECTROMAGNETIC RADIATION; ENGINEERING; ORGANIC COMPOUNDS; ORGANIC POLYMERS; PETROCHEMICALS; PETROLEUM PRODUCTS; POLYMERS; RADIATION EFFECTS; RADIATIONS