Application of pyroelectric crystal and ionic liquid to the production of metal compounds

Zinc fluoride (ZnF2) was deposited on a silicon substrate by changing temperature of a pyroelectric crystal of LiTaO3 on which ionic liquid (EMI-Tf2N) containing zinc ions was dripped at 1 Pa. ZnF2 was also obtained by bombarding argon ions on EMI-Tf2N containing zinc ions. From these results, it is concluded that EMI-Tf2N containing zinc ions on the LiTaO3 crystal was evaporated on the silicon substrate by changing temperature of the LiTaO3 crystal in vacuum and that the evaporated EMI-Tf2N containing metal zinc ions was decomposed to ZnF2 by the bombardment of electrons accelerated by the electric field between the LiTaO3 crystal and the silicon substrate.