99.996 %12C films isotopically enriched and deposited in situ

Ionizing natural abundance carbon dioxide gas, we extract and mass select the ions, depositing thin films isotopically enriched to 99.9961(4) %12C as measured by secondary ion mass spectrometry (SIMS). In solid state quantum information, coherence times of nitrogen-vacancy (NV) centers in 12C enriched diamond exceeding milliseconds demonstrate the viability of NV centers as qubits, motivating improved isotopic enrichment. NV centers in diamond are particularly attractive qubit candidates due to the optical accessibility of the spin states. We present SIMS analysis and cross-sectional scanning electron microscopy of 12C enriched thin film samples grown with this method.