Published January 26, 1992 | Version v1
Journal article

Subthreshold effects with phase state modifications in silicon

  • 1. AN Uzbekskoj SSR, Tashkent (Uzbekistan). Inst. Yadernoj Fiziki

Description

For the first time is obtained slowly developing phase transition (PT) Si-SiO2 in dislocationless silicon with oxygen concentration ≤1016 cm-3. The PT does not depend on the type and concentration of a main doping impurity. PT formation process begins in the field of x radiation and continues at prolonged keeping after irradiation ending. Maximal energy of X-quanta of continuous spectrum is 50 keV, the power density is 1 Wxcm-2

Additional details

Additional titles

Original title (Russian)
Подпороговые эффекты с модификациями фазовых состояний в кремнии

Publishing Information

Journal Title
Pis'ma v Zhurnal Tekhnicheskoj Fiziki
Journal Volume
18
Journal Issue
2
Journal Page Range
p. 61-64.
ISSN
0320-0116
CODEN
PZTFDD