Thin-film transistors with transparent amorphous zinc indium tin oxide channel layer

Thin-film transistors (TFTs) with transparent amorphous zinc indium tin oxide (ZITO) channel layer are demonstrated. Optical transmission of the channel layer is approximately 85% in the visible portion of the electromagnetic spectrum. The channel layer is formed via rf magnetron sputter deposition and then furnace annealed in air. Peak incremental mobilities of 5-19 cm2 V-1 s-1 and turn-on voltages of -4 to -17 V are obtained for devices annealed post-deposition at 100-300 deg. C, respectively. Current-voltage measurements indicate n-channel, depletion-mode transistor operation with excellent drain current saturation and a drain current on-to-off ratio greater than 106. ZITO is one example of an emerging class of high performance TFT channel materials involving transparent amorphous multicomponent oxides composed of heavy-metal cations with (n - 1)d10ns0 (n ≥ 4) electronic configuration