Published November 2006 | Version v1
Journal article Metadata-only

Observation of complete oxidation of InN to In2O3 in air at elevated temperatures by using X-ray photoemission spectroscopy

Creators

  • 1. Pohang University of Science and Technology, Pohang (Korea, Republic of)
  • 2. Pusan National University, Busan (Korea, Republic of)
  • 3. Hanyang University, Seoul (Korea, Republic of)

Description

We present here an X-ray photoemission spectroscopy (XPS) analysis of a polycrystalline InN film on sapphire. The InN was completely oxidized to bixbyite in air after annealing at high temperatures. The analysis of the X-ray diffraction data demonstrated that the oxidation process started around 450 .deg. C. The high-resolution XPS data showed the In3d peaks and the N1s main peak located near 396.4 eV for the InN films. After oxidation, the N1s peak had completely disappeared while the In3d peaks had not changed. These results strongly indicate that the oxidation transformed the structure of InN film to In2O3.

Additional details

Publishing Information

Journal Title
Journal of the Korean Physical Society
Journal Volume
49
Journal Issue
95
Series
20 refs, 2 figs
Journal Page Range
p. 2176-2179
ISSN
0374-4884

INIS

Country of Publication
Korea, Republic of
Country of Input or Organization
Korea, Republic of
INIS RN
43039866
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
ANNEALING; BONDING; FILMS; LANTHANUM NITRIDES; LANTHANUM OXIDES; OXIDATION; POHANG LIGHT SOURCE; SAPPHIRE; X-RAY DIFFRACTION; X-RAY PHOTOELECTRON SPECTROSCOPY
Descriptors DEC
CHALCOGENIDES; CHEMICAL REACTIONS; COHERENT SCATTERING; CORUNDUM; DIFFRACTION; ELECTRON SPECTROSCOPY; FABRICATION; HEAT TREATMENTS; JOINING; LANTHANUM COMPOUNDS; MINERALS; NITRIDES; NITROGEN COMPOUNDS; OXIDE MINERALS; OXIDES; OXYGEN COMPOUNDS; PHOTOELECTRON SPECTROSCOPY; PNICTIDES; RADIATION SOURCES; RARE EARTH COMPOUNDS; SCATTERING; SPECTROSCOPY; SYNCHROTRON RADIATION SOURCES