Published June 1996
| Version v1
Journal article
Differentially evacuated ion energy analyzer for cathodic arc plasma
Creators
- 1. Department of Electrical and Electronic Engineering, Toyohashi University of Technology, Toyohashi 441 (Japan)
Description
A new type of retarding grid ion energy analyzer with a differential evacuation unit has been developed for the measurement of the ion energy distribution of a medium vacuum arc. The ion energy distribution in a cathodic arc plasma of 5 Pa pressure was measured. The experimental results indicate that the ion energy distribution measured with differential evacuation is more accurate than that measured without differential evacuation. copyright 1996 American Institute of Physics
Additional details
Publishing Information
- Journal Title
- Review of Scientific Instruments
- Journal Volume
- 67
- Journal Issue
- 6
- Journal Page Range
- p. 2415-2416.
- ISSN
- 0034-6748
- CODEN
- RSINAK
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 27079475
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Descriptors DEI
- ELECTRIC ARCS; ELECTROSTATIC ANALYZERS; ENERGY SPECTRA; GRIDS; MEDIUM VACUUM; PLASMA DIAGNOSTICS
- Descriptors DEC
- BEAM ANALYZERS; CURRENTS; ELECTRIC CURRENTS; ELECTRIC DISCHARGES; ELECTRODES; SPECTRA