Published 2019 | Version v1
Book Metadata-only

Characteristics of a high-current impulse magnetron discharge during the reactive sputtering of aluminum

Creators

  • 1. Natsional'nyj Issledovatel'skij Yadernyj Univ. «MIFI», Moscow (Russian Federation)

Description

The characteristics of a high-current impulse magnetron discharge have been studied during the reactive sputter deposition of Al in Ar/O2 gas mixture. The dependence of deposition rate on oxygen content in the gas mixture has been measured for different power management regimes. The specific deposition rate values have been obtained for different ratios of on/off times

Abstract (Russian)

В работе исследовались характеристики сильноточного импульсного магнетронного разряда в процессе реактивного распыления Al в среде Ar/O2. Измерены зависимости скорости напыления от содержания кислорода в смеси для различных режимов питания разряда, получены значения удельной скорости напыления для различных соотношений длительности разрядных импульсов и пауз между ними
Part of:
V International conference «Laser, plasma research and technologies» LaPlaz-2019. Collection of scientific papers. Part 2

Additional details

Additional titles

Original title (Russian)
Характеристики сильноточного импульсного магнетронного разряда при реактивном распылении алюминия

Publishing Information

Publisher
NIYaU MIFI
Imprint Place
Moscow (Russian Federation)
ISBN
978-5-7262-2545-6
Imprint Title
V International conference #Left-Pointing Double Angle Quotation Mark#Laser, plasma research and technologies#Right-Pointing Double Angle Quotation Mark# LaPlaz-2019. Collection of scientific papers. Part 2
Imprint Pagination
388 p.
Journal Page Range
p. 104

Conference

Title
5. international conference on laser, plasma research and technologies
Original Conference Title
V Mezhdunarodnaya konferentsiya «Lazernye, plazmennye issledovaniya i tekhnologii» LaPlaz-2019
Acronym
LaPlaz-2019
Dates
12-15 Feb 2019
Place
Moscow (Russian Federation)

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
53089179
Subject category
S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
Resource subtype / Literary indicator
Conference
Descriptors DEI
DEPOSITION; ELECTRIC CURRENTS; ELECTRIC DISCHARGES; MAGNETRONS; MATHEMATICAL MODELS; PULSES
Descriptors DEC
CURRENTS; ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; MICROWAVE EQUIPMENT; MICROWAVE TUBES

Optional Information

Notes
Imprint:V Mezhdunarodnaya konferentsiya #Left-Pointing Double Angle Quotation Mark#Lazernye, plazmennye issledovaniya i tekhnologii#Right-Pointing Double Angle Quotation Mark# LaPlaz-2019. Sbornik nauchnykh trudov. Chast' 2