Published October 1982 | Version v1
Journal article Metadata-only

Characterization of contacts for resistors in thin films

Creators

  • 1. Sao Paulo Univ., SP (Brazil). Escola Politecnica

Description

A method for evaluating effects of metallic contacts of resistors, is described. Resistors of tantalum nitrides on alumina with contacts of NiCr-Au and Ti-Pd-Au were fabricated. These resistors after passivation were submitted to temperatures of 1500C and 2500C in two lots during more than 900 hours, and periodical measures of their characteristics were done. (M.C.K.)

Abstract (Portuguese)

Descreve-se um metodo para avaliacao dos efeitos de contatos metalicos de resistores. Foram fabricados resistores de nitreto de tantalo sobre alumina com contatos de NiCr-Au. Estes submetidos a temperaturas de 1500C e 2500C em 2 lotes durante mais 900 horas efetuando-se medidas periodicas de suas caracteristicas. (autor)

Additional details

Additional titles

Original title (Portuguese)
Caracterizacao de contatos para resistores em filme fino

Publishing Information

Journal Title
Revista Brasileira de Aplicacoes de Vacuo
Journal Volume
2
Journal Issue
2
Series
Rev. Bras. Apl. Vacuo.
Journal Page Range
73-80
ISSN
0101-7659
CODEN
RBAVE

Conference

Title
3. Brazilian Congress on Vacuum Applications to Industry and Science.
Dates
19-21 Jul 1982.
Place
Rio de Janeiro, RJ (Brazil).

INIS

Country of Publication
Brazil
Country of Input or Organization
Brazil
INIS RN
20078889
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ALUMINIUM OXIDES; CHROMIUM; ELECTRIC CONDUCTIVITY; GOLD; HIGH TEMPERATURE; INTERFACES; NICKEL; PALLADIUM; PASSIVATION; RESISTORS; SWITCHES; TANTALUM NITRIDES; THIN FILMS; TITANIUM
Descriptors DEC
ALUMINIUM COMPOUNDS; CHALCOGENIDES; ELECTRICAL EQUIPMENT; ELECTRICAL PROPERTIES; ELEMENTS; EQUIPMENT; FILMS; METALS; NITRIDES; NITROGEN COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; PLATINUM METALS; TANTALUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS