Published February 1974
| Version v1
Journal article
Quantitative analysis of light elements (nitrogen, carbon, and oxygen) in sputtered tantalum films by Auger electron spectroscopy and secondary ion mass spectrometry (SIMS)
Description
no abstract available
Additional details
Identifiers
- DOI
- 10.1021/ac60338a026;
Publishing Information
- Journal Title
- Analytical Chemistry
- Journal Volume
- 46
- Journal Issue
- 2
- Series
- Anal. Chem.
- Journal Page Range
- 189-196
- ISSN
- 0003-2700
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 5132455
- Subject category
- S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
- Descriptors DEI
- AUGER ELECTRON SPECTROSCOPY; CALIBRATION STANDARDS; CARBON; CHEMICAL ANALYSIS; FILMS; MASS SPECTROSCOPY; NITROGEN; OXYGEN; QUANTITATIVE CHEMICAL ANALYSIS; SENSITIVITY; TANTALUM
- Descriptors DEC
- ELECTRON SPECTROSCOPY; ELEMENTS; METALS; NONMETALS; SPECTROSCOPY; TRANSITION ELEMENTS
Optional Information
- Notes
- Updated automatically by Metadata and Full-Text Enrichment Agent