Trajectory separation of channeled ions in crystalline materials

Spatial distributions of ions implanted into crystals can be of a very complex shape with 'lobes' due to ions penetrating through open channels in several directions. This paper suggests an analytical model which represents such a distribution as a linear combination of 'random' distribution and one or more 'channeled' distributions. This study is focused on the algorithm of the separation of ion trajectories into several distributions. The first distribution includes those ions which have undergone predominantly random collisions. The other distributions include those ions which have undergone mainly 'weak' collisions and traveled mostly along the main channeling directions. Our binary collision approximation (BCA) simulator is used for generating and analyzing ion trajectories. The spatial moments can be extracted from each separated distribution. It is shown that 2D analytical distributions obtained as a linear combination of distributions derived from these moments and aligned along corresponding channeling direction are in a very good agreement with direct BCA calculations