Published May 1994 | Version v1
Journal article

Density measurement of amorphous SixGe1-x alloys

  • 1. Groupe de Recherche en Physique et Technologie des Couches Minces, Dept. de Physique, Univ. de Montreal, PQ (Canada)

Description

The atomic density of amorphous SixGe1-x alloys (x = 1, 0.85, 0.67, 0.50, 0.20 and 0) has been measured. Mono-crystalline SixGe1-x layers were implanted with 1.50-2.75 MeV Si2+ and Ge2+ ions to produce the amorphous material. Using surface profilometry and RBS/channeling, it was found that amorphous alloys are less dense than the crystalline alloys, and that Vegard's law underestimates the a-SixGe1-x density. (orig.)

Additional details

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
Journal Volume
90
Journal Issue
1-4
Journal Page Range
p. 438-441.
ISSN
0168-583X
CODEN
NIMBEU

Conference

Title
15. international conference on atomic collisions in solids (ICALS-15).
Dates
26-30 Jul 1993.
Place
London (Canada).