Published May 1994
| Version v1
Journal article
Density measurement of amorphous SixGe1-x alloys
Creators
- 1. Groupe de Recherche en Physique et Technologie des Couches Minces, Dept. de Physique, Univ. de Montreal, PQ (Canada)
Description
The atomic density of amorphous SixGe1-x alloys (x = 1, 0.85, 0.67, 0.50, 0.20 and 0) has been measured. Mono-crystalline SixGe1-x layers were implanted with 1.50-2.75 MeV Si2+ and Ge2+ ions to produce the amorphous material. Using surface profilometry and RBS/channeling, it was found that amorphous alloys are less dense than the crystalline alloys, and that Vegard's law underestimates the a-SixGe1-x density. (orig.)
Additional details
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
- Journal Volume
- 90
- Journal Issue
- 1-4
- Journal Page Range
- p. 438-441.
- ISSN
- 0168-583X
- CODEN
- NIMBEU
Conference
- Title
- 15. international conference on atomic collisions in solids (ICALS-15).
- Dates
- 26-30 Jul 1993.
- Place
- London (Canada).
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Netherlands
- INIS RN
- 26000350
- Subject category
- S36: MATERIALS SCIENCE; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- AMORPHOUS STATE; ANNEALING; BINARY ALLOY SYSTEMS; BULK DENSITY; GERMANIUM ALLOYS; GERMANIUM IONS; INELASTIC SCATTERING; ION CHANNELING; ION IMPLANTATION; LATTICE PARAMETERS; LAYERS; MEASURING METHODS; MEV RANGE 01-10; MONOCRYSTALS; RUTHERFORD SCATTERING; SILICON ALLOYS; SILICON IONS; SOLID SOLUTIONS; SURFACES; TEMPERATURE DEPENDENCE; VEGARD LAW
- Descriptors DEC
- ALLOY SYSTEMS; ALLOYS; CHANNELING; CHARGED PARTICLES; CRYSTALS; DENSITY; DISPERSIONS; ELASTIC SCATTERING; ENERGY RANGE; HEAT TREATMENTS; HOMOGENEOUS MIXTURES; IONS; MEV RANGE; MIXTURES; PHYSICAL PROPERTIES; SCATTERING; SOLUTIONS