Published October 2006
| Version v1
Journal article
Design of 10 cm x 30 cm rectangular radio frequency ion beam source
Description
A radio frequency ion beam source with a 10 cm x 30 cm rectangular cross-section beam is developed and tested. This source is designed to provide large cover area for ion beam etching and polishing. With a four grid extraction system, this source can operate in argon at beam energies from 100 eV to 1000 eV. When the RF power is about 900 W, beam currents can reach to 600 mA in argon. The beam current uniformity is better than ±6% along the major axis over 27 cm length at a distance 26 cm from the ion beam source. (authors)
Additional details
Publishing Information
- Journal Title
- Nuclear Techniques
- Journal Volume
- 29
- Journal Issue
- 10
- Journal Page Range
- p. 734-737
- ISSN
- 0253-3219
INIS
- Country of Publication
- China
- Country of Input or Organization
- China
- INIS RN
- 38080010
- Subject category
- S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
- Descriptors DEI
- ARGON; ARGON IONS; BEAM CURRENTS; CROSS SECTIONS; DESIGN; DISTANCE; ETCHING; EV RANGE 100-1000; GRIDS; INDUCTION; ION BEAMS; ION SOURCES; LENGTH; PLASMA; POLISHING; RADIOWAVE RADIATION
- Descriptors DEC
- BEAMS; CHARGED PARTICLES; CURRENTS; DIMENSIONS; ELECTRODES; ELECTROMAGNETIC RADIATION; ELEMENTS; ENERGY RANGE; EV RANGE; FLUIDS; GASES; IONS; NONMETALS; RADIATIONS; RARE GASES; SURFACE FINISHING
Optional Information
- Notes
- 6 figs., 15 refs.