Optimization of MBE of CdTe/CdTe
- 1. Grumman Corp., Bethpage, NY (United States). Corporate Research Center
- 2. State Univ. of New York, Stony Brook, NY (United States). Dept. of Materials Science and Engineering
Description
A detailed optimization of MBE growth of CdTe on CdTe (111)B using white beam synchrotron x-ray topography, and x-ray rocking curve analysis has been carried out. Defect structures in (111)B substrates and epilayers are imaged with white beam topography and, for the first time, direct observation of stress induced microtwin growth in CdTe epilayers has been made. X-ray rocking curve analysis of CdTe substrates is shown to be relatively insensitive to defect structures consisting of dislocations and inclusions. On the other hand rocking curve analysis of (111) epilayers reveals a sensitivity to the presence of microtwin. In this paper the defect microstructure of a CdTe (111)B epilayer with the narrowest rocking curve FWHM value published to date (9.4 arc-sec) is discussed
Additional details
Additional titles
- Subtitle (English)
- Refinement in structural quality evaluation of mbe grown (111) CdTe
Publishing Information
- Publisher
- Materials Research Society.
- Imprint Place
- Pittsburgh, PA (United States)
- ISBN
- 1-55899-157-3
- Imprint Title
- Proceedings of defect engineering in semiconductor growth, processing and device technology
- Imprint Pagination
- 1144 p.
- Journal Page Range
- p. 169-174.
Conference
- Title
- 1992 Material Research Society (MRS) spring meeting.
- Dates
- 27 Apr - 2 May 1992.
- Place
- San Francisco, CA (United States).
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 24032420
- Subject category
- S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- CADMIUM TELLURIDES; CRYSTAL DEFECTS; EPITAXY; EVALUATION; MICROSTRUCTURE; MOLECULAR BEAMS; OPTIMIZATION; TWINNING; X-RAY RADIOGRAPHY
- Descriptors DEC
- BEAMS; CADMIUM COMPOUNDS; CHALCOGENIDES; CRYSTAL GROWTH METHODS; CRYSTAL STRUCTURE; TELLURIDES; TELLURIUM COMPOUNDS
Optional Information
- Secondary number(s)
- CONF-920402--.