Auger electron spectroscopy analysis of the contact reaction of Pt-Si codeposited films and silicon

Codeposited alloy films of Pt-Si on silicon, proposed earlier for the formation of shallow Schottky contacts, were studied by Auger electron spectroscopy. The contact depth after annealing was found to be larger than expected. An accumulation of silicon and a depletion of platinum in the outer 200-300 A of the film was also observed. Analysis of the line shape for the Auger transitions leads to the conclusion that the outer silicon-rich region consists of a mixture of PtSi and elemental silicon, probably as a result of silicon out-diffusion. (Auth.)