The effect of support gas on Fullerene (C60) ion generation

At the 400kV ion implanter of TIARA, Japan Atomic Energy Agency, effects of Fullerene ion irradiation on samples are under study. The beam current, however, is not sufficient. To increase the Fullerene ion beam current, an optimization of the ion source parameters is important. The authors have then measured the dependence of the Fullerene (C60) ion current intensity on the flow rate of support gases. The measurement has been made for three gases, Ne, Ar and Xe. The result shows that smaller flow rate of the gas with larger mass number is better for increasing the Fullerene current. Further examination for faint gas flow and for other gases is needed. (K.Y.)