Published 2006
| Version v1
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Effect of the deposition temperature on the roughness of polycrystalline silicon thin films obtained by LPCVD
Creators
- 1. Faculdade de Tecnologia de Sao Paulo (FATEC-SP CEETEPS), SP (Brazil). Centro Estadual Educacao Tecnologica Paula Souza
Description
no abstract available
Files
42007356.pdf
Files
(51.1 kB)
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Additional details
Additional titles
- Original title (Portuguese)
- Efeito da temperatura de deposicao na rugosidade de filmes finos de silicio policristalino obtidos por LPCVD
Publishing Information
- Imprint Pagination
- [1 p.]
- Report number
- INIS-BR--8488
Conference
- Title
- 29. Brazilian national meeting on condensed matter physics
- Original Conference Title
- 29. Encontro nacional de fisica da materia condensada
- Dates
- 9-13 May 2006
- Place
- Sao Lourenco, MG (Brazil)
INIS
- Country of Publication
- Brazil
- Country of Input or Organization
- Brazil
- INIS RN
- 42007356
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- No Abstract, Conference
- Descriptors DEI
- CRYSTALLIZATION; CRYSTALLOGRAPHY; CRYSTALS; ROUGHNESS; SCANNING ELECTRON MICROSCOPY; STRUCTURAL CHEMICAL ANALYSIS; SULFUR; SULFUR FLUORIDES; THIN FILMS; X RADIATION; X-RAY DIFFRACTION; X-RAY SPECTROSCOPY
- Descriptors DEC
- COHERENT SCATTERING; DIFFRACTION; ELECTROMAGNETIC RADIATION; ELECTRON MICROSCOPY; ELEMENTS; FILMS; FLUORIDES; FLUORINE COMPOUNDS; HALIDES; HALOGEN COMPOUNDS; IONIZING RADIATIONS; MICROSCOPY; NONMETALS; PHASE TRANSFORMATIONS; RADIATIONS; SCATTERING; SPECTROSCOPY; SULFUR COMPOUNDS; SURFACE PROPERTIES