Published December 1989
| Version v1
Journal article
Investigation of phase composition of dielectric layers obtained upon oxidation of CdxHg1-xTe in oxygen plasma
- 1. AN Ukrainskoj SSR, Kiev (Ukrainian SSR). Inst. Poluprovodnikov
Description
The chemical composition of the insulating layers obtained by CdxHg1-xTe (CMT) oxidation in oxygen plasma was studied using XPS combined with ion etching. The elemental composition of the proper oxide was shown to be such : Cd-20 %, Hg-3 %, Te-30 %, O-47 %. The binding energies of core electrons Cd3d5/2, Hg4f7/2, Te3d5/2, O1s were determined. It was concluded that TeO2 is the main component of the CMT proper oxide
Additional details
Additional titles
- Original title (Russian)
- Исследование фазового состава диэлектрических слоев, полученных при окислении Cд
Publishing Information
- Journal Title
- Poverkhnost': Fizika, Khimiya, Mekhanika
- Journal Issue
- no.5
- Series
- Poverkhn.: Fiz., Khim., Mekh.
- CODEN
- PFKMD
INIS
- Country of Publication
- USSR
- Country of Input or Organization
- USSR
- INIS RN
- 22002578
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- BINDING ENERGY; CADMIUM TELLURIDES; CHEMICAL COMPOSITION; DIELECTRIC PROPERTIES; LAYERS; MERCURY TELLURIDES; N-TYPE CONDUCTORS; OXIDATION; OXIDES; PHASE STUDIES; SURFACES
- Descriptors DEC
- CADMIUM COMPOUNDS; CHALCOGENIDES; CHEMICAL REACTIONS; ELECTRICAL PROPERTIES; ENERGY; MATERIALS; MERCURY COMPOUNDS; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; SEMICONDUCTOR MATERIALS; TELLURIDES; TELLURIUM COMPOUNDS