Published July 15, 2013 | Version v1
Journal article Metadata-only

The modulation structure induced changes in mechanical properties of TiAlN/Al2O3 multilayers

Creators

  • 1. College of Physics and Electronic Information Science, Tianjin Normal University, Tianjin 300387 (China)
  • 2. Key Laboratory of Beam Technology and Material Modification of Ministry of Education, Beijing Normal University, Beijing 100875 (China)
  • 3. Ninth People's Hospital, Shanghai Jiao Tong University, School of Medicine, Shanghai 200011 (China)
  • 4. Tianjin Institute of Urological Surgery, Tianjin Medical University, Tianjin 300070 (China)
  • 5. Department of Mechanical and Materials Engineering, University of Western Ontario, London, ON (Canada)

Description

TiAlN/Al2O3 multilayers which had different separate layer thickness of TiAlN or Al2O3 were synthesized by sputtering Ti3Al and Al2O3 targets with N2 and Ar gases. The influence of modulation periods and modulation ratios on structure and properties of TiAlN/Al2O3 multilayers was investigated using scanning electron microscopy, X-ray diffraction, X-ray Photoelectron Spectroscopy, surface profiler, and nanoindenter. Compared to TiAlN layer with only (2 0 0) preferred orientation, TiAlN/Al2O3 multilayers were crystallized with orientations in the TiAlN (1 1 1), TiAlN (2 2 2) and AlN (1 0 0). Besides, weak Al2O3 (0 2 2) orientation is observed, when modulation period is 8.9 nm. The maximum hardness about 36.6 GPa was obtained at modulation period of 10.4 nm and modulation ratio of 10:1. The hardness and the toughness of TiAlN/Al2O3 multilayers increase as individual TiAlN layer thickness increases

Availability note (English)

Available from http://dx.doi.org/10.1016/j.nimb.2012.11.062

Additional details

Identifiers

DOI
10.1016/j.nimb.2012.11.062;
PII
S0168-583X(13)00064-5;

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
Journal Volume
307
Journal Page Range
p. 123-126
ISSN
0168-583X
CODEN
NIMBEU

Conference

Title
18. international conference on ion beam modifications of materials
Acronym
IBMM2012
Dates
2-7 Sep 2012
Place
Qingdao (China)

INIS

Country of Publication
Netherlands
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
45065243
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ALUMINIUM NITRIDES; ALUMINIUM OXIDES; GRAIN ORIENTATION; HARDNESS; LAYERS; MAGNETRONS; MODULATION; PRESSURE RANGE GIGA PA; SCANNING ELECTRON MICROSCOPY; SPUTTERING; SURFACES; THICKNESS; WEAR; X-RAY DIFFRACTION; X-RAY PHOTOELECTRON SPECTROSCOPY
Descriptors DEC
ALUMINIUM COMPOUNDS; CHALCOGENIDES; COHERENT SCATTERING; DIFFRACTION; DIMENSIONS; ELECTRON MICROSCOPY; ELECTRON SPECTROSCOPY; ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; MECHANICAL PROPERTIES; MICROSCOPY; MICROSTRUCTURE; MICROWAVE EQUIPMENT; MICROWAVE TUBES; NITRIDES; NITROGEN COMPOUNDS; ORIENTATION; OXIDES; OXYGEN COMPOUNDS; PHOTOELECTRON SPECTROSCOPY; PNICTIDES; PRESSURE RANGE; SCATTERING; SPECTROSCOPY

Optional Information

Copyright
Copyright (c) 2013 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.