Published 1982 | Version v1
Journal article Metadata-only

A new empirical formula for the sputtering yield

Creators

  • 1. Okayama Coll. of Science (Japan)
  • 2. Nagoya Univ. (Japan). Faculty of Engineering

Description

A new empirical formula for the sputtering yield at the normal incidence has been proposed. It is found that the new empirical formula can predict well the energy-dependence of the sputtering yield for various ion-target combinations. Another interesting conclusion is that one of the adjustable parameters of the new formula shows the Z2-oscillation. (author)

Additional details

Publishing Information

Journal Title
Radiat. Eff. Lett.
Journal Volume
68
Journal Issue
3
Series
Radiat. Eff. Lett.
Journal Page Range
83-87
ISSN
0142-2448

INIS

Country of Publication
United Kingdom
Country of Input or Organization
United Kingdom
INIS RN
14734688
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
ANGULAR DISTRIBUTION; ATOMIC NUMBER; ENERGY DEPENDENCE; IONS; MASS NUMBER; MATHEMATICAL MODELS; SPUTTERING; TARGETS
Descriptors DEC
CHARGED PARTICLES; DISTRIBUTION