Superficial characterization and nano structural of nano multilayers Cr/Cr N obtained by UBM with different unbalance grades

Coatings of 25 bilayers of Cr/Cr N, with total thickness between 1.32 and 1.67 microns, were deposited by reactive sputtering on silicon and H13 steel, in argon and argon with nitrogen atmospheres. A power of 160 watts, flows of argon and nitrogen of 9 and 3 sc cm respectively, and an axial unbalanced magnetron, whose coefficient of geometrical unbalance KG was varied between 0.85 and 1.37. Of these coatings, micrographs of surface and cross section scanning electron microscopy were obtained, was make a micro structural characterization with X-ray diffraction, a nano structural characterization by transmission electron microscopy, and surface characterization by atomic force microscopy in tapping mode: analysis showed uniform surface coating with globular and pyramidal formations, which contain some granular inclusions and microscopic craters. With the increase in the unbalance of the magnetic field, the grain size, the roughness and the speed of the coatings growth were increased. (Author)