Published April 1975 | Version v1
Journal article Metadata-only

Determination of the complex refractive index profiles in P31+ ion implanted silicon by ellipsometry

Creators

  • 1. Nebraska Univ., Lincoln (USA)

Description

no abstract available

Additional details

Identifiers

DOI
10.1016/0039-6028(75)90363-5;

Publishing Information

Journal Title
Surface Science
Journal Volume
49
Journal Issue
2
Series
Surf. Sci.
Journal Page Range
441-458
ISSN
0039-6028

INIS

Country of Publication
Netherlands
Country of Input or Organization
Netherlands
INIS RN
6204226
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
ION IMPLANTATION; KEV RANGE 10-100; OPTICAL PROPERTIES; PHOSPHORUS IONS; SILICON; SURFACES
Descriptors DEC
CHARGED PARTICLES; ELEMENTS; ENERGY RANGE; IONS; KEV RANGE; PHYSICAL PROPERTIES; SEMIMETALS

Optional Information

Notes
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