Published 1971 | Version v1
Book

New aspects of atom location: flux peaking

Creators

Description

no abstract available

Additional details

Publishing Information

Publisher
Springer-Verlag New York, Inc.
Imprint Place
New York
Imprint Title
Ion Implantation in Semiconductors
Imprint Pagination
p. 287-296.

Conference

Title
2. international conference on ion implantation in semiconductors.
Dates
24 May 1971.
Place
Garmisch-Partenkirchen, Germany.

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
3029761
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
CRYSTAL DEFECTS; CRYSTAL LATTICES; CRYSTALS; ION CHANNELING; ION IMPLANTATION; IONS; MEASURING METHODS; SILICON; SPATIAL DISTRIBUTION; YTTERBIUM IONS
Descriptors DEC
CHANNELING; CHARGED PARTICLES; CRYSTAL STRUCTURE; DISTRIBUTION; ELEMENTS; SEMIMETALS